Electronically integrated, mass-manufactured, microscopic robots

Electronically integrated, mass-manufactured, microscopic robots

Nature, Published online: 26 August 2020; doi:10.1038/s41586-020-2626-9

A new class of voltage-controllable electrochemical actuators that are compatible with silicon processing are used to produce over one million sub-hundred-micrometre walking robots on a single four-inch wafer.
Source: Nature